Oriented, single-phase thin films of potassium tantalate-niobate
An oriented, essentially single phase perovskite film of potassium tantalate-niobate is formed. Preferred substrate surfaces for deposition include SrTiO3 (110) and (100) and MgO (100). Films formed on SrTiO3 (110) and (100) are epitaxial. The films are formed by applying a solution of an organometallic complex of tantalum, potassium and niobium onto a substrate surface. The deposited solution is dried and organics removed by heating. The thus formed film is then transferred to an oven preheated to a temperature of between about 700 deg C and 750 deg C. After cooling, further layers of single phase, oriented potassium tantalate-niobate may be deposited by repeating the same procedures. The deposited films can form form useful device for microelectronics and electro-optics.
- Research Organization:
- Department of the Navy, Washington, DC (United States)
- Assignee:
- Department of the Navy, Washington, DC
- Patent Number(s):
- PAT-APPL-7-950 558; AD-A-259103/0/XAB
- OSTI ID:
- 6732225
- Country of Publication:
- United States
- Language:
- English
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Epitaxial potassium niobate thin films prepared by metalorganic chemical vapor deposition
STRUCTURE OF NIOBATES AND TANTALATES
Related Subjects
360101* -- Metals & Alloys-- Preparation & Fabrication
360601 -- Other Materials-- Preparation & Manufacture
ALKALI METAL COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
ALLOYS
CHALCOGENIDES
DEPOSITION
FERROELECTRIC MATERIALS
FILMS
INTERMETALLIC COMPOUNDS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MICROELECTRONICS
NIOBATES
NIOBIUM COMPOUNDS
OPTICS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
POTASSIUM COMPOUNDS
REFRACTORY METAL COMPOUNDS
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUBSTRATES
TANTALATES
TANTALUM COMPOUNDS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS