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U.S. Department of Energy
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Three-dimensional profiling with the Sandia nuclear microprobe

Conference ·
OSTI ID:6727857

A nuclear microprobe analysis system attached to Sandia's EN tandem Van de Graaff accelerator is described. A magnetic quadrupole doublet lens is used for the final focus and 2..mu..m beam diameters have been obtained. Several illustrative applications of the microprobe, including the first three-dimensional concentration profiles using Rutherford backscattering and elastic recoil detection ever measured, are given.

Research Organization:
Sandia National Labs., Albuquerque, NM (USA)
DOE Contract Number:
AC04-76DP00789
OSTI ID:
6727857
Report Number(s):
SAND-82-1552C; CONF-821123-3; ON: DE83002243
Country of Publication:
United States
Language:
English