Three-dimensional profiling with the Sandia nuclear microprobe

Journal Article · Thu Mar 31 23:00:00 EST 1983 · IEEE Trans. Nucl. Sci.; (United States)

DOI:https://doi.org/10.1109/TNS.1983.4332492· OSTI ID:5690651

Doyle, B L; Wing, N D

A nuclear microprobe analysis system attached to Sandia's EN tandem Van de Graaff accelerator is described. A magnetic quadrupole doublet lens is used for the final focus and 2 ..mu..m beam diameters have been obtained. Several illustrative applications of the microprobe, including the first three-dimensional concentration profiles using Rutherford backscattering and elastic recoil detection ever measured, are given.

• Research Organization: Sandia Natl. Lab., Albuquerque, NM 87185
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5690651
• Journal Information: IEEE Trans. Nucl. Sci.; (United States), Journal Name: IEEE Trans. Nucl. Sci.; (United States) Vol. 30:2; ISSN IETNA
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430100* -- Particle Accelerators-- Design
Development
& Operation
ACCELERATORS
DESIGN
ELASTIC SCATTERING
ELECTROSTATIC ACCELERATORS
ION PROBES
NATIONAL ORGANIZATIONS
PROBES
RUTHERFORD SCATTERING
SANDIA LABORATORIES
SCATTERING
TANDEM ELECTROSTATIC ACCELERATORS
US AEC
US DOE
US ERDA
US ORGANIZATIONS
VAN DE GRAAFF ACCELERATORS