Process for depositing thin film layers onto surfaces modified with organic functional groups and products formed thereby
A method is provided for producing a thin film product, comprising a first step in which an underlying substrate of a first material is provided. The underlying substrate includes a plurality of unmodified sites. The underlying substrate is then chemically modified wherein a plurality of organic functional groups are attached to a plurality of the unmodified sites. The arrangement and type of the functional group used can be selected for the purpose of controlling particular properties of the second material deposited. A thin film layer of at least one second material is then deposited onto the chemically modified underlying substrate. This can be accomplished by connecting the thin film to the underlying substrate by binding the thin film to the functional groups. 5 figs.
- Research Organization:
- Battelle Memorial Institute, Columbus, OH (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC06-76RL01830
- Assignee:
- Battelle Memorial Inst., Richland, WA (United States)
- Patent Number(s):
- US 5,759,708/A/
- Application Number:
- PAN: 8-318,540
- OSTI ID:
- 672621
- Resource Relation:
- Other Information: PBD: 2 Jun 1998
- Country of Publication:
- United States
- Language:
- English
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