Surface characterization of radio frequency water plasma treated and annealed polycrystalline tin oxide thin films

Journal Article · · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/cm00007a008· OSTI ID:6720567

Tarlov, M J; Evans, J F ^[1]

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1. Univ. of Minnesota, Minneapolis (USA)

Angle-resolved X-ray photoelectron spectroscopy (AR-XPS) and electron energy loss spectroscopy (EELS) have been used to examine the consequences of the interaction of radio frequency water plasmas with polycrystalline tin oxide surfaces. Results from AR-XPS and EELS indicate that an extensive surface hydroxylation or gel layer (> 10 {angstrom}) does not form on the tin oxide surface from exposure to atmosphere and/or water plasma treatment. Surface hydroxyl coverages determined by AR-XPS are a factor of 3 lower than those calculated from crystallographic models. Annealing of water plasma treated tin oxide films in ultrahigh vacuum results in the desorption of water, dehydroxylation of the surface, and creation of oxygen vacancies. AR-XPS data indicate a uniform concentration of oxygen vacancies over a sampling depth of approximately 15 {angstrom}. Water plasma treatment of oxygen-deficient tin oxide surfaces created by annealing in ultrahigh vacuum eliminates oxygen vacancies and restores Sn{sup 4+} valency in the surface region.

• OSTI ID: 6720567
• Journal Information: Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 2:1; ISSN 0022-3654; ISSN JPCHA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
CHALCOGENIDES
DATA
DATA ANALYSIS
ELECTRON SPECTROSCOPY
EXPERIMENTAL DATA
FILMS
HYDROGEN COMPOUNDS
INFORMATION
MATERIALS
MEASURING INSTRUMENTS
MEASURING METHODS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PLASMA
SEMICONDUCTOR MATERIALS
SPECTROSCOPY
SURFACE TREATMENTS
THIN FILMS
TIN COMPOUNDS
TIN OXIDES
WATER