Atomic interdiffusion in Au/amorphous NiNb/semiconductor systems
Conference
·
OSTI ID:6714615
Backscattering measurements were performed to assess the stability of amorphous NiNb for contacts of high temperature electronics. The interdiffusion of amorphous NiNb and three semiconductors - Si, GaAs and GaP - was measured to study the stability for primary metallization applications. Diffusion of Au with amorphous NiNb and the same three semiconductors were also investigated in order to address diffusion barrier applications of amorphous metals. Results indicate that the use of amorphous NiNb as a contact or a diffusion barrier could extend the useful operation temperature range for GaP devices to above 550/sup 0/C. 6 figures.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA); Wisconsin Univ., Madison (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6714615
- Report Number(s):
- SAND-82-1587C; CONF-821107-20; ON: DE83002553
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360600* -- Other Materials
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ALLOYS
ALPHA PARTICLES
AMORPHOUS STATE
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
DATA
DIFFUSION
DIFFUSION BARRIERS
ELASTIC SCATTERING
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GALLIUM PHOSPHIDES
GOLD
INFORMATION
METALS
NICKEL ALLOYS
NIOBIUM ALLOYS
NUMERICAL DATA
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RUTHERFORD SCATTERING
SCATTERING
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
TEMPERATURE DEPENDENCE
TRANSITION ELEMENTS
360600* -- Other Materials
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ALLOYS
ALPHA PARTICLES
AMORPHOUS STATE
ARSENIC COMPOUNDS
ARSENIDES
CHARGED PARTICLES
DATA
DIFFUSION
DIFFUSION BARRIERS
ELASTIC SCATTERING
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GALLIUM PHOSPHIDES
GOLD
INFORMATION
METALS
NICKEL ALLOYS
NIOBIUM ALLOYS
NUMERICAL DATA
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RUTHERFORD SCATTERING
SCATTERING
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
TEMPERATURE DEPENDENCE
TRANSITION ELEMENTS