A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr
- National Laboratory for High Energy Physics, 1-1 Ohi, Tsukuba-shi, Ibaraki-ken, 305 (Japan)
An extremely high vacuum (XHV) chamber was fabricated and tested. The vacuum chamber was made of special surface finished (EX-process) aluminum alloy in oxygen and argon atmosphere. The chamber was assembled using TIG welding in an argon atmosphere and by electron beam welding. The system was evacuated with a turbo-backed 300 l/s turbomolecular pump separated from the main chamber using a right angle valve. The liquid nitrogen shroud is installed inside the main vacuum chamber. The XHV is maintained by two 300 l/s sputter ion pumps and a titanium sublimation pump with a liquid nitrogen shroud. These pumps are also made of aluminum alloys. An ultimate pressure of 3{times}10{sup {minus}13} Torr was measured with a point collector gauge with a spherical anode mounted on an Al-flange. Residual gas analysis in the order 10{sup {minus}13} Torr was performed by a newly developed Q-mass filter. To suppress outgassing from the quadrupole electrode, the ion source is mounted on an Al-flange separated from the quadrupole electrode.
- OSTI ID:
- 6703453
- Report Number(s):
- CONF-8904230-; CODEN: APCPC
- Journal Information:
- AIP Conference Proceedings (American Institute of Physics); (USA), Vol. 199:1; Conference: AVS topical conference on surface conditioning of vacuum systems, Los Angeles, CA (USA), 3-5 Apr 1989; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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