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X-ray-preionized high-pressure KrF laser

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.90242· OSTI ID:6692435
As a novel alternative to existing means of preionization, we have used x radiation to preionize a high-pressure KrF laser mixture and found that the x-ray preionization produces a uniform glow discharge for high-pressure KrF laser gas.
Research Organization:
Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, 233, Japan
OSTI ID:
6692435
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 33:11; ISSN APPLA
Country of Publication:
United States
Language:
English

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