Effect of preionization uniformity on a KrF laser

Journal Article · Wed Apr 01 04:00:00 EST 1981 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.329074· OSTI ID:6501921

Sumida, S; Kunitomo, K; Kaburagi, M; Obara, M; Fujioka, T; Sato, K

Our investigation has revealed that the preionization electron density and the spatial distribution of the preionization electrons could play an important role for the scaling of discharge pumped lasers. The KrF laser energy, pulse width, and laser output burn pattern were strongly dependent on the preionization electron density. The spatial uniformity of the preionization in parallel to the electric field affected the discharge uniformity. A more efficient power deposition was obtained in the stronger preionized region of the laser gas mixture.

• Research Organization: Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Japan
• OSTI ID: 6501921
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 52:4; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DATA
DISTRIBUTION
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRON DENSITY
ELECTRONS
ELEMENTARY PARTICLES
ENERGY-LEVEL TRANSITIONS
EXCITATION
EXPERIMENTAL DATA
FERMIONS
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
IONIZATION
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LEPTONS
NUMERICAL DATA
PULSES
RARE GAS COMPOUNDS
SCALING LAWS
SPATIAL DISTRIBUTION