XPS study of the adherence of refractory carbide, silicide, and boride rf-sputtered wear-resistant coatings
Radio frequency sputtering was used to deposit refractory carbide, silicide, and boride coatings on 440-C steel substrates. Both sputter etched and pre-oxidized substrates were used and the films were deposited with and without a substrate bias. The composition of the coatings was determined as a function of depth by x-ray photoelectron spectroscopy combined with argon ion etching. Friction and wear tests were conducted to evaluate coating adherence. In the interfacial region there was evidence that bias may produce a graded interface for some compounds. Biasing, while generally improving bulk film stoichiometry, can adversely affect adherence by removing interfacial oxide layers. in all cases but the iron oxide coverage was only complete on the preoxidized substrates. The film and iron oxides were mixed in the MoSi/sub 2/ and Mo/sub 2/C films but layered in the Mo/sub 2/B/sub 5/ films. In the case of mixed oxides, pre-oxidation enhanced film adherence. In the layered case it did not.
- Research Organization:
- National Aeronautics and Space Administration, Lewis Research Center, Cleveland, Ohio 44135
- OSTI ID:
- 6662712
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 15:6; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ADHESION
ALLOYS
BORIDES
BORON COMPOUNDS
CHEMICAL REACTIONS
CHROMIUM ALLOYS
CHROMIUM STEELS
COATINGS
CORROSION RESISTANT ALLOYS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ETCHING
FILMS
FRICTION
INTERFACES
IONIZING RADIATIONS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MOLYBDENUM BORIDES
MOLYBDENUM COMPOUNDS
MOLYBDENUM SILICIDES
OXIDATION
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
REFRACTORIES
SILICIDES
SILICON COMPOUNDS
SPECTROSCOPY
SPUTTERING
STAINLESS STEEL-440
STAINLESS STEELS
STEELS
SURFACE FINISHING
TITANIUM BORIDES
TITANIUM COMPOUNDS
TITANIUM SILICIDES
TRANSITION ELEMENT COMPOUNDS
WEAR RESISTANCE
X RADIATION