Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

X-ray photoelectron spectroscopy study of radiofrequency-sputterer refractory-compound steel interfaces

Technical Report ·
OSTI ID:6556453
Radiofrequency sputtering was used to deposit Mo/sub 2/C, Mo/sub 2/B/sub 5/, and MoSi2 coatings on 440C steel substrates. Both sputter etched and preoxidized substrates were used, and the films were deposited with and without a substrate bias of -300 V. The composition of the coatings was measured as a function of depth by X-ray photoelectron spectroscopy combined with argon ion etching. In the interfacial region there was evidence that bias produced a graded interface in Mo/sub 2/B/sub 5/ but not in Mo/sub 2/C. Oxides of iron and of all film constituents except carbon were present in all cases, but the iron oxide concentration was higher and the layer, thicker on the preoxidized substrates. The film and iron oxides were mixed in the MoSi2 and Mot/sup 2/C films but layered in the Mo/sub 2/B/sub 5/ film. The presence of mixed oxides correlates with enhanced film adhesion.
Research Organization:
National Aeronautics and Space Administration, Cleveland, OH (USA). Lewis Research Center
OSTI ID:
6556453
Report Number(s):
N-78-20336; NASA-TP-1161; E-9374
Country of Publication:
United States
Language:
English