Glow-discharge-created electron beams: Cathode materials, electron gun designs, and technological applications

Journal Article · Wed Aug 01 04:00:00 EDT 1984 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.334008· OSTI ID:6652508

Rocca, J J; Meyer, J D; Farrell, M R; Collins, G J

The operating characteristics of glow-discharge-created electron beams are discussed. Ten different cathode materials are compared with regard to maximum electron beam current achieved and the beam generation efficiency as measured calorimetrically. Specific electron gun designs are presented for a variety of applications that include: cw ion laser excitation; electron beam assisted chemical vapor deposition of microelectronic films; and wide area annealing of ion-implantation damage to silicon substrates. The use of sintered metal-ceramic (e.g., Mo-Al/sub 2/O/sub 3/) cathodes to generate multikilowatt electron beams in a pure noble gas discharge is reported. Cathode materials with high secondary electron emission coefficients by ion bombardment allow for electron beam production in glow discharges at 50%--80% generation efficiency values.

• Research Organization: Department of Electrical Engineering, Colorado State University, Fort Collins, Colorado 80523
• OSTI ID: 6652508
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 56:3; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BEAM PRODUCTION
BEAM-PLASMA SYSTEMS
BEAMS
CATHODES
CERAMICS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COLLISIONS
COMPARATIVE EVALUATIONS
CURRENTS
DEPOSITION
DESIGN
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRON BEAMS
ELECTRON EMISSION
ELECTRON GUNS
ELECTRONIC CIRCUITS
ELEMENTS
EMISSION
FABRICATION
GLOW DISCHARGES
HEAT TREATMENTS
ION COLLISIONS
ION IMPLANTATION
LEPTON BEAMS
MICROELECTRONIC CIRCUITS
MOLYBDENUM COMPOUNDS
OPERATION
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL PROPERTIES
PLASMA
SECONDARY EMISSION
SEMIMETALS
SILICON
SINTERING
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
USES