Energy spectrum of an abnormal glow discharge created electron beam
Abnormal glow discharge created electron beams, applied to microelectronic film processing, have been studied theoretically and experimentally. The beam mode of operation occurs in the discharge region adjacent to the glow to arc transition regime. A numerical model simulates the energy distribution I(E) of transmitted beam electrons both inside and outside the cathode sheath. Changes in the I(E) spectrum are calculated as a function of distance in the field-free region outside the sheath. In the theoretical model of beam generation and propagation we include secondary electrons created at the cathode following ion bombardment, the electron energy gain that occurs in the field of the cathode sheath, elastic electron-atom collisions, electron-atom ionization collisions, electron-atom excitation collisions, superelastic electron-atom collisions, and electron-electron collisions. The calculated I(E) spectrum agrees with experimentally measured data at a total ambient pressure of 0.2-0.9 torr in a helium-oxygen mixture with a cathode current density in the range of 10-100 mA/cm/sup 2/.
- Research Organization:
- Dept. of Electrical Engineering, Colorado State Univ., Fort Collins, CO 80523
- OSTI ID:
- 5146670
- Journal Information:
- IEEE Trans. Plasma Sci.; (United States), Journal Name: IEEE Trans. Plasma Sci.; (United States) Vol. PS-14:4; ISSN ITPSB
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AMPLIFICATION
ATOM COLLISIONS
BEAM PRODUCTION
BEAM TRANSPORT
BEAMS
CATHODES
COLLISIONS
CURRENT DENSITY
DISPERSIONS
DISTANCE
ELECTRIC DISCHARGES
ELECTRODES
ELECTRON BEAMS
ELECTRON COLLISIONS
ELECTRON-ATOM COLLISIONS
ELECTRON-ELECTRON COLLISIONS
ELEMENTS
ENERGY SPECTRA
FILMS
FLUIDS
GAIN
GASES
GLOW DISCHARGES
HELIUM
ION BEAMS
LEPTON BEAMS
MATHEMATICAL MODELS
MEDIUM PRESSURE
MICROELECTRONICS
MIXTURES
NONMETALS
OXYGEN
PARTICLE BEAMS
RARE GASES
SECONDARY BEAMS
SPECTRA