Chemical kinetics models for semiconductor processing
Conference
·
OSTI ID:663558
- Sandia National Labs., Albuquerque, NM (United States)
- Sandia National Labs., Livermore, CA (United States)
- Colorado School of Mines, Golden, CO (United States)
Chemical reactions in the gas-phase and on surfaces are important in the deposition and etching of materials for microelectronic applications. A general software framework for describing homogeneous and heterogeneous reaction kinetics utilizing the Chemkin suite of codes is presented. Experimental, theoretical and modeling approaches to developing chemical reaction mechanisms are discussed. A number of TCAD application modules for simulating the chemically reacting flow in deposition and etching reactors have been developed and are also described.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 663558
- Report Number(s):
- SAND--97-1828C; CONF-971201--; ON: DE98002574; BR: DP0102011
- Country of Publication:
- United States
- Language:
- English
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