Acoustic resonator and method of making same

Patent · Thu Oct 13 00:00:00 EDT 1983

OSTI ID:6633642

Kline, G R; Lakin, K M

A method of fabricating an acoustic wave resonator wherein all processing steps are accomplished from a single side of said substrate. The method involves deposition of a multi-layered Al/AlN structure on a GaAs substrate followed by a series of fabrication steps to define a resonator from said composite. The resulting resonator comprises an AlN layer between two Al layers and another layer of AlN on an exterior of one of said Al layers.

• DOE Contract Number: W-7405-ENG-82
• Assignee: Dept. of Energy
• Application Number: ON: DE84014655
• OSTI ID: 6633642
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
RESONATORS
DESIGN
FABRICATION
ACOUSTIC MONITORING
ACOUSTICS
ALUMINIUM
GALLIUM ARSENIDES
MECHANICAL STRUCTURES
ARSENIC COMPOUNDS
ARSENIDES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
GALLIUM COMPOUNDS
METALS
MONITORING
PNICTIDES
420200* - Engineering- Facilities
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