Current limiting of field emitter array cathodes

Thesis/Dissertation · Wed Jan 01 04:00:00 EST 1986

OSTI ID:6621021

Lee, K J

The Field Emitter Array (FEA) cathode possesses high emission potential (approx.30A/cm/sup 2/) at low applied voltages (100-200 volts) but performance has been hampered by non-uniform emission across the array. Poor emission uniformity is mainly related to small variations in emitter tip geometry (of the order of 10-100A), which cannot be rectified by present fabrication techniques. To improve emission uniformity from the arrays, this dissertation investigated the use of current-limiting resistors, individually dedicated to and in series with each emitter, to compensate for the differences in emission. A thin film of silicon was deposited on the backside of a ZrO/sub 2/-W composite chip (the substrate on which emitter structure was based) to form series resistors. Characterization of the silicon film was carried out in a SEM with a micromanipulator capable of making contact with a single tungsten pin so that direct I-V measurement of individual series resistors was possible. To supplement the experimental effort, a mathematical mode of the Current-Limited Field Emitter Array (CLFEA) cathode was devised. A study of the model indicated the Fowler-Nordheim (F-N) plot of resistor current-limited emission from an array would have an upturning curvature.

• Research Organization: Georgia Inst. of Tech., Atlanta (USA)
• OSTI ID: 6621021
• Country of Publication: United States
• Language: English

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300403* -- Thermionic Converters-- Materials
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