In situ epitaxial growth of Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-//sub x/ films by molecular beam epitaxy with an activated oxygen source
Highly oriented, epitaxial Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-//sub x/ thin films were prepared on MgO(100) by molecular beam epitaxy at a substrate temperature of 550--600 /sup 0/C. The in situ growth was achieved by incorporating reactive oxygen species produced by a remote microwave plasma in a flow-tube reactor. The epitaxial (001) orientation is demonstrated by x-ray diffraction and ion channeling. In situ reflection high-energy electron diffraction showed that a layer-by-layer growth has produced a well-ordered, atomically smooth surface in the as-grown tetragonal phase of an oxygen stoichiometry of 6.2--6.3. A 500 /sup 0/C anneal in 1 atm of O/sub 2/ converted the oxygen content to 6.7 to 6.8. Typical superconducting transport properties of an Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-//sub x/ film 1000 A thick are rho(300 K) = 325 ..mu cap omega.. cm, rho(300 K)/rho(100 K) = 2.4, T/sub c/(onset) = 92 K, and T/sub c/(R = 0) = 82 K. The transport J/sub c/ at 75 K is 1 x 10/sup 5/ A/cm/sup 2/, and increases to 1 x 10/sup 6/ A/cm/sup 2/ at 70 K.
- Research Organization:
- ATandT Bell Laboratories, Murray Hill, New Jersey 07974
- OSTI ID:
- 6619486
- Journal Information:
- Appl. Phys. Lett.; (United States), Vol. 53:26
- Country of Publication:
- United States
- Language:
- English
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CURRENT DENSITY
MOLECULAR BEAM EPITAXY
STOICHIOMETRY
COPPER OXIDES
MAGNESIUM OXIDES
VAPOR DEPOSITED COATINGS
YTTRIUM OXIDES
CRYSTAL STRUCTURE
EXPERIMENTAL DATA
HIGH TEMPERATURE
LOW TEMPERATURE
SUPERCONDUCTING FILMS
SURFACES
THIN FILMS
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
DATA
DIFFRACTION
EPITAXY
FILMS
INFORMATION
MAGNESIUM COMPOUNDS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
SCATTERING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
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360202 - Ceramics
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