Control of leakage resistance in Pb(Zr,Ti)O[sub 3] thin films by donor doping

Journal Article · Tue Nov 01 04:00:00 EST 1994 · Journal of the American Ceramic Society; (United States)

DOI:https://doi.org/10.1111/j.1151-2916.1994.tb04536.x· OSTI ID:6607016

Dimos, D; Lockwood, S J ^[1]; Schwartz, R W ^[2]

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1. Sandia National Labs., Albuquerque, NM (United States)
2. Sandia National Labs., Albuquerque, NM (United States) Advanced Materials Lab., Albuquerque, NM (United States)

Donor doping, with La and Nb, has been used successfully to improve the leakage resistance of Pb(Zr,Ti)O[sub 3] (PZT) films. Donor doping of Pb(Zr[sub 0.5]Ti[sub 0.5])O[sub 3] films has led to an improvement in the leakage resistance of over 2[1/2] orders of magnitude at elevated temperatures (T [>=] 100 C). The effect on leakage resistance is the same for the A-site (La) and B-site (Nb) dopants. However, the improvement is only about 1 order of magnitude near room temperature. This temperature effect is due to an increase in the transition temperature from a low activation energy mechanism to a higher activation energy mechanism. Similar improvements in leakage resistance have also been obtained by increasing the Pb concentration in the starting solution, which implies that Pb vacancies are the dominant acceptor species in the undoped films. In addition, donor doping has been effective in improving the electrical breakdown strength at elevated temperatures. Consequently, donor-doped PZT films have been shown to be superior to undoped films for applications requiring high leakage resistance, such as decoupling capacitors.

• DOE Contract Number: AC04-94AL85000
• OSTI ID: 6607016
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 77:11; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALLOYS
CAPACITORS
DIELECTRIC PROPERTIES
DOPED MATERIALS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
EQUIPMENT
FABRICATION
LANTHANUM ADDITIONS
LANTHANUM ALLOYS
LEAD COMPOUNDS
MATERIALS
NIOBIUM ADDITIONS
NIOBIUM ALLOYS
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PZT
RARE EARTH ADDITIONS
RARE EARTH ALLOYS
SOL-GEL PROCESS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS