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Microstructural characterization of. cap alpha. -Al/sub 2/O/sub 3/ implanted with iron

Conference ·
OSTI ID:6593323

The microstructural and compositional changes produced in the near surface region of single crystals of ..cap alpha..-Al/sub 2/O/sub 3/ by ion-implantation with iron have been investigated by a number of complementary techniques, including Rutherford backscattering spectroscopy (RBS), conversion-electron Moessbauer spectroscopy (CEMS), analytical electron microscopy (AEM), and scanning transmission electron microscopy (STEM). Iron precipitates, 1 to 3 nm in diameter, have been identified in as-implanted material at depths corresponding to the peak in the deposited iron concentration profile. The same techniques have been used to monitor the redistribution of iron and the corresponding changes in valence state during post-implantation annealing. Electron microscopy has been to correlate RSB and CEMS results with the microstructural development. 9 refs., 4 figs., 1 tab.

Research Organization:
Oak Ridge National Lab., TN (USA)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
6593323
Report Number(s):
CONF-881155-38; ON: DE89006037
Country of Publication:
United States
Language:
English