The technology and applications of selective oxidation of AlGaAs
Conference
·
OSTI ID:656770
- Sandia National Labs., Albuquerque, NM (United States). Center for Compound Semiconductor Science and Technology
- Univ. of Virginia, Charlottesville, VA (United States)
Wet oxidation of AlGaAs alloys, pioneered at the University of Illinois a decade ago, recently has been used to fabricate high performance vertical-cavity surface emitting lasers (VCSELs). The superior properties of oxide-confined VCSELs has stimulated interest in understanding the fundamental of wet oxidation. The authors briefly review the technology of selective oxidation of III-V alloys, including the oxide microstructure and oxidation processing as well as describe its application to selectively oxidized VCSELs.
- Research Organization:
- Sandia National Labs., Center for Compound Semiconductor Science and Technology, Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE Office of Financial Management and Controller, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 656770
- Report Number(s):
- SAND--98-0885C; CONF-980687--; ON: DE98006169; BR: YNO100000
- Country of Publication:
- United States
- Language:
- English
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