The effects of secondary particle bombardment on ion beam sputtered thin films of Y sub 1 Ba sub 2 Cu sub 3 O sub x deposited on MgO (100)

Conference · Thu Jan 25 04:00:00 EST 1990 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6552708

Doyle, J P; Roy, R A; Cuomo, J J; Whitehair, S J; Mahoney, L; McGuire, T R ^[1]; Chisholm, M F ^[2]

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1. IBM Research Division, T.J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY (USA)
2. Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN (USA)

We have investigated the effects of low energy bombardment on the microstructural, compositional, and electrical characteristics of ion beam sputtered thin films of Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}}. During deposition, secondary bombardment of the growing film was performed using a Kaufman or ECR type ion source with energy ranging up to 125 eV. Microstructural changes have been characterized by TEM and XRD. Ion channeling has been performed to characterize the degree of orientation of the films. The effects of bombardment on the composition of the films were studied by RBS. It has been found that the use of an ECR microwave oxygen ion source trained on the growing films induces as-deposited superconductivity and also play a role in the texturing of the films. The effects of ion bombardment on the critical current (J{sub {ital c}}) and temperature (T{sub {ital c}}) are also reported.

• OSTI ID: 6552708
• Report Number(s): CONF-891092--
• Conference Information: Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Journal Volume: 199:1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360206 -- Ceramics
Cermets
& Refractories-- Radiation Effects
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DEPOSITION
ELECTRON MICROSCOPY
ENERGY BEAM DEPOSITION
FILMS
HIGH-TC SUPERCONDUCTORS
ION BEAMS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MICROSCOPY
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
TRANSMISSION ELECTRON MICROSCOPY
YTTRIUM COMPOUNDS
YTTRIUM OXIDES