Plating thickness standards. Milestone report. [Aluminium on Kapton and copper on Kapton]

Technical Report · Tue Aug 01 04:00:00 EDT 1978

DOI:https://doi.org/10.2172/6535479· OSTI ID:6535479

Russell, R J

Because aluminum-on-Kapton and copper-on Kapton plating-thickness standards are not available from the National Bureau of Standards or any known commercial source, standards have been developed and fabricated at Bendix, Kansas City. Interferometry and weight-gain methods were used to determine the metal thickness on each of the reference standards. The reference standards were used to certify the thickness of several sets of working standards by comparison using beta-backscatter methods for aluminum on Kapton and four-point resistance measurements for copper on Kapton. All working standards have been placed on a calibration schedule for periodic inspection for damage and comparison with a set of reference standards. By this technique, each working standard either will be recertified and returned to service or replaced with a certified standard. The precision of the reference standards was evaluated by a series of statistical tests that were performed on each set of calibration data. These tests provided an effective means for determining the quality of the data and estimating the measurement uncertainty. The measurement uncertainty of the thickness values assigned to the working standards should not exceed +-0.26 ..mu..m for aluminum on Kapton and +-0.43 ..mu..m for copper on Kapton.

• Research Organization: Bendix Corp., Kansas City, MO (USA)
• DOE Contract Number: EY-76-C-04-0613
• OSTI ID: 6535479
• Report Number(s): BDX-613-1805(Rev.)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360100* -- Metals & Alloys
440300 -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ALUMINIUM
BETA PARTICLES
CALIBRATION STANDARDS
CHARGED PARTICLES
COATINGS
COPPER
DENSITY
DEPOSITION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
MEASURING INSTRUMENTS
METALS
PHYSICAL PROPERTIES
PLATING
RADIOMETRIC GAGES
STANDARDS
SUBSTRATES
SURFACE COATING
THICKNESS
THICKNESS GAGES
TRANSITION ELEMENTS
VAPOR DEPOSITED COATINGS