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Title: Low-pressure metalorganic chemical vapor deposition of photoluminescent Eu-doped Y sub 2 O sub 3 films

Journal Article · · Journal of Materials Research; (USA)
;  [1]
  1. Allied-Signal Inc., P. O. Box 1021R, Morristown, New Jersey 07962 (USA)

We have produced thin photoluminescent films of Eu-doped Y{sub 2}O{sub 3} (Y{sub 2}O{sub 3}:Eu) by low-pressure metalorganic chemical vapor deposition (MOCVD). Yttrium and europium {beta}-diketonate precursors are thermally decomposed in a hot-walled MOCVD reactor in the presence of oxygen at a total reactor pressure of 1 Torr. The films are microcrystalline and photoluminescent as deposited and contain {lt}1 atomic percent of carbon contamination. Subsequent annealing at 1200 {degree}C in air enhances and stabilizes the luminescence. We have measured the photoluminescent lifetimes of the MOCVD films as a function of temperature for the Eu{sup +3} {sup 5}D{sub 1}{r arrow}{sup 7}F{sub 1} and {sup 5}D{sub 0}{r arrow}{sup 7}F{sub 2} transitions using excimer laser excitation at 248 nm. We present a kinetic model which can account for the observed emission lifetimes from 20--1000 {degree}C.

OSTI ID:
6534541
Journal Information:
Journal of Materials Research; (USA), Vol. 5:7; ISSN 0884-2914
Country of Publication:
United States
Language:
English