Electron attachment and ionization coefficients and electron drift velocities in BF/sub 3/ and SiF/sub 4/

Journal Article · Tue Feb 28 23:00:00 EST 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342920· OSTI ID:6532999

Hunter, S R; Carter, J G; Christophorou, L G

The drift velocity of electrons (w) in SiF/sub 4/ and BF/sub 3/ has been measured over the density-reduced electric field (E/N) range 0.5 x 10/sup -17/ V cm/sup 2/ less than or equal toE/Nless than or equal to300 x 10/sup -17/ V cm/sup 2/ using a pulsed Townsend experimental technique. The electron attachment (eta/N) and ionization (..cap alpha../N) coefficients have also been measured in SiF/sub 4/ and BF/sub 3/ over the E/N range 30 x 10/sup -17/ V cm/sup 2/ less than or equal toE/Nless than or equal to300 x 10/sup -17/ V cm/sup 2/ in the same experiment. The electron drift velocities in these two gases exhibit regions of negative differential conductivity (NDC) similar to but smaller in magnitude than those in CH/sub 4/ and CF/sub 4/ . The effective ionization coefficient (alpha-bar/N) has been obtained from the eta/N and ..cap alpha../N measurements in both gases, from which the high-voltage limiting electric field strengths (E/N)/sub lim/ have been found to be 123 x 10/sup -17/ V cm/sup 2/ for BF/sub 3/ and 121 x 10/sup -17/ V cm/sup 2/ for SiF/sub 4/. The significance of these results in modeling gas discharges for a number of technological applications is indicated.

• Research Organization: Atomic, Molecular, and High Voltage Physics Group, Health and Safety Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
• OSTI ID: 6532999
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 65:5; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640410* -- Fluid Physics-- General Fluid Dynamics
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BORON COMPOUNDS
BORON FLUORIDES
DATA
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRON ATTACHMENT
ELECTRON DRIFT
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
IONIZATION
MATHEMATICAL MODELS
NUMERICAL DATA
SILICON COMPOUNDS
SILICON FLUORIDES