Thin-film inhomogeneities studied by energy-loss measurements using ion beams

Journal Article · Wed Feb 01 04:00:00 EST 1989 · Phys. Rev. A; (United States)

DOI:https://doi.org/10.1103/PhysRevA.39.1049· OSTI ID:6528737

Capuj, N E; Eckardt, J C; Lantschner, G H; Arista, N R; Jakas, M M

A method to evaluate thin-film thickness inhomogeneities is presented. It is based on the measurements of the first two moments of the energy-loss distributions of swift ions traversing thin foils at two different beam incidence angles. We apply the method to a set of thin (approx.200-A) aluminum foils, resolving thickness fluctuations of the order of 10%.

• Research Organization: Centro Atomico Bariloche, Comision Nacional de Energria Atomica, 8400 San Carlos de Bariloche, Argentina
• OSTI ID: 6528737
• Journal Information: Phys. Rev. A; (United States), Journal Name: Phys. Rev. A; (United States) Vol. 39:3; ISSN PLRAA
• Country of Publication: United States
• Language: English

Related Subjects

654001* -- Radiation & Shielding Physics-- Radiation Physics
Shielding Calculations & Experiments
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
ALUMINIUM
CHARGED PARTICLES
CHARGED-PARTICLE TRANSPORT
DIMENSIONS
ELEMENTS
ENERGY LOSSES
FLUCTUATIONS
FOILS
INCIDENCE ANGLE
IONS
LOSSES
METALS
RADIATION TRANSPORT
THICKNESS
TRANSMISSION
VARIATIONS