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Superconducting T/sub c/'s and phase relationships of sputter-deposited Nb/sub 3/Ge

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.325990· OSTI ID:6517764
Nb/sub 3/Ge which is fully superconducting above 21 K has been prepared by sputter deposition in a very clean vacuum system at substrate temperatures in the range 500--550 /sup 0/C, or 200 /sup 0/C less than the temperatures needed in other sputtering systems. For a series of compound targets, superconducting T/sub c/'s and metallurgical phases, as established from x-ray diffraction studies, were determined as a function of substrate temperature and argon pressure. Maximum T/sub c/'s were found in films prepared over a narrow range of compositions and substrate temperatures. These conditions coincide with the region of phase stability for the A15. A small amount of oxygen (> or approx. =1.0%) as determined by Auger analysis, was found to be present in high-T/sub c/ films, while lower T/sub c/ films all had less oxygen.
Research Organization:
School of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
OSTI ID:
6517764
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 50:2; ISSN JAPIA
Country of Publication:
United States
Language:
English