Silicide formation with codeposited titanium-tantalum alloys on silicon
The formation of disilicides of titanium and tantalum from Ti-Ta alloys codeposited on silicon and polycrystalline silicon have been investigated using x-ray diffraction techniques, resistance measurements, and Auger electron spectroscopy. Titanium and tantalum in the Ti-Ta alloy interacted independently with silicon. There was no titanium/tantalum compound formation and no ternary was detected. The growth of each metal silicide was sustained by continuous out-diffusion of silicon into the Ti-Ta alloy film until the metals were consumed in the silicide transformation. This behavior may account for the absence of phase separation and component accumulation. An initial reaction was observed after the 600 /sup 0/C, 30 min anneal. The stable end phases formed at temperatures greater than or equal to800 /sup 0/C are TiSi/sub 2/ and TaSi/sub 2/. High molecular weight intermetallics such as Ta/sub 5/Si/sub 3/ and Ti/sub 5/Si/sub 3/ that are normally not detected in Ta-Si and Ti-Si interaction studies were detected, suggesting a stabilizing effect of the impurities. The sheet resistance of the heat-treated samples is: (a) a strong function of the titanium content of the Ti-Ta alloy (low for Ti-rich alloys); (b) lower on silicon substrates; (c) invariant at temperatures >900 /sup 0/C. The etch rate of the heat-treated samples in buffered hydrofluoric acid increased with increasing titanium content in the film.
- Research Organization:
- ATandT Bell Laboratories, 600 Mountain Avenue, Murray Hill, New Jersey 07974
- OSTI ID:
- 6512934
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:4; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360101* -- Metals & Alloys-- Preparation & Fabrication
360102 -- Metals & Alloys-- Structure & Phase Studies
360104 -- Metals & Alloys-- Physical Properties
ALLOYS
CHEMICAL REACTIONS
CRYSTAL STRUCTURE
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ETCHING
METALS
PHASE STUDIES
PHYSICAL PROPERTIES
PLASMA
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICIDES
SILICON
SILICON COMPOUNDS
SURFACE FINISHING
SYNTHESIS
TANTALUM
TANTALUM ALLOYS
TANTALUM COMPOUNDS
TANTALUM SILICIDES
TITANIUM
TITANIUM ALLOYS
TITANIUM COMPOUNDS
TITANIUM SILICIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VERY HIGH TEMPERATURE