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U.S. Department of Energy
Office of Scientific and Technical Information

Simple method for adhesion measurements

Conference ·
OSTI ID:6508794
An indentation method for determining the adhesion of interfaces between thin films and substrates has been developed. The method provides a quantitative measure of the interface fracture resistance and has the advantage of simplicity and reproducibility. The method has been demonstrated for a range of ZnO/Si systems and the adherence has been correlated with acoustic properties.
Research Organization:
Lawrence Berkeley Lab., CA (USA)
OSTI ID:
6508794
Report Number(s):
LBL-11668; CONF-800765-6
Country of Publication:
United States
Language:
English