Pyrolysis of ammonolyzed or hydrolyzed perchlorosilane films

Technical Report · Sun Nov 01 04:00:00 EST 1987

OSTI ID:6507075

Keisler, R B

A method of producing silicon nitride and silicon dioxide examined in this project uses the perchlorosilanes SiCl/sub 4/, Si/sub 2/Cl/sub 6/, and Si/sub 3/Cl/sub 8/. These perchlorosilanes are liquid under ambient conditions which allows them to be easily spread out as thin films on substrates. The perchlorosilanes react with ammonia to produce silicon imides which, upon heating, produce silicon nitride. Similarly, the perchlorosilanes may be reacted with water to form silicic acids which, upon heating, produce silicon dioxide. The perchlorosilanes were first synthesized, then deposited as thin films on silicon. The reactions mentioned above were then carried out to test whether silicon nitride and silicon dioxide will form as thin films by this process, thus possibly providing a new route to the manufacture of these important materials. 82 refs., 20 figs., 6 tabs.

• Research Organization: Ames Lab., IA (USA)
• DOE Contract Number: W-7405-ENG-82
• OSTI ID: 6507075
• Report Number(s): IS-T-1326; ON: DE89007623
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ADHESION
AMMONOLYSIS
CHALCOGENIDES
CHEMICAL REACTION YIELD
CHEMICAL REACTIONS
CHLORIDES
CHLORINE COMPOUNDS
DECOMPOSITION
DEPOSITION
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATORS
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
MINERALS
NITRIDES
NITROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
PYROLYSIS
SEMIMETALS
SILANES
SILICA
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
SOLVOLYSIS
SYNTHESIS
THERMOCHEMICAL PROCESSES
THIN FILMS
YIELDS