Pumping behavior of sputter ion pumps

Journal Article · Wed Apr 01 04:00:00 EST 1981 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.570858· OSTI ID:6506043

Chou, T S; McCafferty, D

The ultrahigh vacuum requirements of ISABELLE are obtained by pumping stations, each consisting of a 1000 l/s titanium sublimation pump for active gases (N/sub 2/, H/sub 2/, O/sub 2/, CO, etc.), and a 20 l/s sputter ion pump for inert gases (methane, noble gases like He, etc.). The combination of the alarming production rate of methane from titanium sublimation pumps (TSP) and the decreasing pumping speed of sputter ion pumps (SIP) in the ultrahigh vacuum region (UHV) leads us to investigate this problem. In this paper, we first describe the essential physics and chemistry of the SIP in a very clean condition, followed by a discussion of our measuring techniques. Finally, we present our measured methane, argon, and helium pumping speeds for three different ion pumps in the range of 10/sup -6/ to 10/sup -11/ Torr. The virtues of the best pump are also discussed.

• Research Organization: Accelerator Department, Brookhaven National Laboratory, Upton, New York 11973
• OSTI ID: 6506043
• Journal Information: J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 18:3; ISSN JVSTA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420700* -- Engineering-- Vacuum Engineering-- (-1987)
ALKANES
ARGON
DEGASSING
ELECTRIC DISCHARGES
ELEMENTS
EQUIPMENT
FLUIDS
GASES
GETTERING
HELIUM
HIGH VACUUM
HYDROCARBONS
LABORATORY EQUIPMENT
METHANE
NONMETALS
ORGANIC COMPOUNDS
PENNING DISCHARGES
PUMPS
RARE GASES
SPUTTER-ION PUMPS
ULTRAHIGH VACUUM
VACUUM PUMPS
VACUUM SYSTEMS