Pumping behavior of sputter ion pumps
Conference
·
OSTI ID:5016573
The ultrahigh vacuum requirements of ISABELLE is obtained by distributed pumping stations. Each pumping station consists of 1000 l/s titanium sublimation pump for active gases (N/sub 2/, H/sub 2/, O/sub 2/, CO, etc.), and a 20 l/s sputter ion pump for inert gases (methane, noble gases like He, etc.). The combination of the alarming production rate of methane from titanium sublimation pumps (TSP) and the decreasing pumping speed of sputter ion pumps (SIP) in the ultrahigh vacuum region (UHV) leads us to investigate this problem. In this paper, we first describe the essential physics and chemistry of the SIP in a very clean condition, followed by a discussion of our measuring techniques. Finally measured methane, argon and helium pumping speeds are presented for three different ion pumps in the range of 10/sup -6/ to 10/sup -11/ Torr. The virtues of the best pump are also discussed.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA)
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5016573
- Report Number(s):
- BNL-28292; CONF-801037-16
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420700 -- Engineering-- Vacuum Engineering-- (-1987)
43 PARTICLE ACCELERATORS
430303* -- Particle Accelerators-- Experimental Facilities & Equipment
EQUIPMENT
ISABELLE STORAGE RINGS
LABORATORY EQUIPMENT
MEASURING METHODS
PERFORMANCE TESTING
PUMPS
SPUTTER-ION PUMPS
STORAGE RINGS
TESTING
VACUUM PUMPS
VACUUM SYSTEMS
420700 -- Engineering-- Vacuum Engineering-- (-1987)
43 PARTICLE ACCELERATORS
430303* -- Particle Accelerators-- Experimental Facilities & Equipment
EQUIPMENT
ISABELLE STORAGE RINGS
LABORATORY EQUIPMENT
MEASURING METHODS
PERFORMANCE TESTING
PUMPS
SPUTTER-ION PUMPS
STORAGE RINGS
TESTING
VACUUM PUMPS
VACUUM SYSTEMS