Development of scanning X-ray microscopes for materials science spectromicroscopy at the Advanced Light Source

Conference · Tue Jul 01 04:00:00 EDT 1997

OSTI ID:650349

Warwick, T ^[1]; Ade, H ^[2]; Cerasari, S ^[1]

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1. Lawrence Berkeley National Lab., CA (United States)
2. North Carlina State Univ., Raleigh, NC (United States). Dept. of Physics

Third generation synchrotron sources of soft x-rays provide an excellent opportunity to apply established x-ray spectroscopic materials analysis techniques to surface imaging on a sub-micron scale. This paper describes an effort underway at the Advanced Light Source (ALS) to pursue this development using Fresnel zone plate lenses. These are used to produce a sub-micron spot of x-rays for use in scanning microscopy. Several groups have developed microscopes using this technique. A specimen is rastered in the focused x-ray spot and a detector signal is acquired as a function of position to generate an image. Spectroscopic capability is added by holding the small spot on a feature of interest and scanning through the spectrum. The authors are pursuing two spectroscopic techniques: Near Edge X-ray Absorption Spectroscopy (NEXAFS), X-ray Photoelectron Spectroscopy (XPS) which together provide a powerful capability for light element analysis in materials science.

• Research Organization: Lawrence Berkeley National Lab., CA (United States)
• Sponsoring Organization: USDOE Office of Energy Research, Washington, DC (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 650349
• Report Number(s): LBNL--40676; LSBL--398; CONF-970889--; ON: DE98052834
• Country of Publication: United States
• Language: English

Related Subjects

40 CHEMISTRY
43 PARTICLE ACCELERATORS
ABSORPTION SPECTROSCOPY
ACCELERATOR FACILITIES
ADVANCED LIGHT SOURCE
MICROSCOPES
PHOTOELECTRON SPECTROSCOPY
SOFT X RADIATION