Multiple-species ion beams from titanium-hafnium alloy cathodes in vacuum arc plasmas

Journal Article · Tue Jun 01 04:00:00 EDT 1993 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.352390· OSTI ID:6499588

Sasaki, J; Sugiyama, K ^[1]; Yao, X; Brown, I ^[2]

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1. Nippon Steel Corporation, Electronics Research Laboratories, 10-1 Fuchinobe 5-chome, Sagamihara Shi, Kanagawa 229 (Japan)
2. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)

We have studied the ion spectra of the plasma produced by the metal vapor vacuum arc for the case when the cathode material is a solid solution TiHf alloy of variable composition ratio. A vacuum arc ion source was used to generate an intense beam of metal ions and a time-of-flight ion charge-to-mass diagnostic was used to measure the beam ion species and charge state distributions. A range of different cathode compositions was examined, from pure Ti to pure Hf and with five different alloy mixes between these extremes. We find that the ratio of ion currents in the multiple-species ion beam corresponds approximately to the ratio of elements in the cathode, and that the mean charge states of the elemental ion components remain approximately constant as the cathode composition ratio is changed. Multispecies metal ion beams can readily be generated in this way and the ion species characteristics of the beam are predictable.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 6499588
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 73:11; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
661220* -- Particle Beam Production & Handling
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOY SYSTEMS
ALLOYS
BINARY ALLOY SYSTEMS
CATHODES
CURRENTS
ELECTRIC ARCS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRODES
EVAPORATION
HAFNIUM ALLOYS
ION SOURCES
PHASE TRANSFORMATIONS
PLASMA
SPECTRA
TITANIUM ALLOYS
Ta
Targets-- (1992-)
VACUUM EVAPORATION