Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode

Journal Article · Mon Feb 15 04:00:00 EST 2010 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.3257703· OSTI ID:22053804

Savkin, K P; Yushkov, Yu G; Nikolaev, A G; Oks, E M; Yushkov, G Yu ^[1]

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1. Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 634055 (Russian Federation)

This paper presents the results of time-of-flight mass spectrometry studies of the elemental and mass-to-charge state compositions of metal ion beams produced by a vacuum arc ion source with compound cathode (WC-Co{sub 0.5}, Cu-Cr{sub 0.25}, Ti-Cu{sub 0.1}). We found that the ion beam composition agrees well with the stoichiometric composition of the cathode material from which the beam is derived, and the maximum ion charge state of the different plasma components is determined by the ionization capability of electrons within the cathode spot plasma, which is common to all components. The beam mass-to-charge state spectrum from a compound cathode features a greater fraction of multiply charged ions for those materials with lower electron temperature in the vacuum arc cathode spot, and a smaller fraction for those with higher electron temperature within the spot. We propose a potential diagram method for determination of attainable ion charge states for all components of the compound cathodes.

• OSTI ID: 22053804
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 81; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CATHODES
CHARGE STATES
ELECTRON TEMPERATURE
ION BEAMS
ION SOURCES
IONIZATION
MASS SPECTROSCOPY
PLASMA
STOICHIOMETRY
TIME-OF-FLIGHT METHOD