Reduction of outgassing rate by glow discharge cleaning
- Department of Physics, College of William and Mary, Williamsburg, Virginia 23185 (United States)
The effectiveness of glow discharge cleaning (GDC) as a means of decreasing the pump-down time of vacuum systems was studied. We measured the outgassing rate of an electropolished stainless steel surface after it was exposed to glow discharges fueled by various gases (He, He/1%--3%H{sub 2}, He/1%--3%CH{sub 4}, H{sub 2}, Ar) following a standard 1 h of venting to ambient air. It is shown that He GDC is most effective in reduction of outgassing rate: a He GDC trial with a dose of 0.8 C/cm{sup 2} reduces the outgassing rate and subsequently the pump-down time by a factor of 13. For given glow discharge currents, the outgassing reduction factor is directly proportional to the glow discharge duration. The reduction of post-GDC outgassing is a result of enhanced desorption of H{sub 2}, CO, and CO{sub 2} by He GDC as observed by residual gas analysis during the discharge. The GDC results are consistent with our previously proposed diffusion models for water outgassing from metal surfaces. {copyright} {ital 1995} {ital American} {ital Vacuum} {ital Society}
- Research Organization:
- Thomas Jefferson National Accelerator Facility
- DOE Contract Number:
- AC05-84ER40150
- OSTI ID:
- 64926
- Journal Information:
- Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Journal Issue: 3 Vol. 13; ISSN 0734-2101; ISSN JVTAD6
- Country of Publication:
- United States
- Language:
- English
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