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Effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.574440· OSTI ID:6488384
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The sputtering of the graphite covered Faraday shield of an ion cyclotron resonance heating loop antenna has been studied. The antenna operated at 50 MHz and was exposed to a weakly magnetized plasma produced by the High Particle Flux Facility at Oak Ridge National Laboratory. The flux at the antenna was on the order of 3 x 10/sup 17/ cm/sup -2/ s/sup -1/. A dc bias voltage applied to the antenna allowed the effective energy of the impinging hydrogen ions to be varied up to 65 eV. Coupled rf power varied from 0 to 3 kW. Sputtering depths were directly measured by surface topography. Sputtering enhancement due to rf was between a factor of 2 to 4, depending on the position along the antenna. Antenna voltage profiles were calculated and used to correlate measured erosion coefficients with ion energies. Various sputtering theories and possible chemical sputtering effects are discussed.
Research Organization:
Department of Nuclear Engineering, University of Illinois, Urbana, Illinois 61801
OSTI ID:
6488384
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
Country of Publication:
United States
Language:
English

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Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700205 -- Fusion Power Plant Technology-- Fuel
Heating
& Injection Systems
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
ANTENNAS
BEAM MONITORS
CARBON
CYCLOTRON RESONANCE
ELECTRICAL EQUIPMENT
ELEMENTAL MINERALS
ELEMENTS
EQUIPMENT
FARADAY CUPS
GRAPHITE
HEATING
HIGH-FREQUENCY HEATING
ICR HEATING
ION CYCLOTRON-RESONANCE
MEASURING INSTRUMENTS
MICROWAVE HEATING
MINERALS
MONITORS
NATIONAL ORGANIZATIONS
NONMETALS
OPERATION
ORNL
PERFORMANCE
PLASMA HEATING
RESONANCE
SHIELDING
SPUTTERING
US AEC
US DOE
US ERDA
US ORGANIZATIONS