Epitaxial growth of SrTiO{sub 3} thin films by metalorganic chemical vapor deposition
- Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
- Department of Chemistry, Northwestern University, Evanston, Illinois 60208 (United States)
Epitaxial SrTiO{sub 3} thin films were prepared using low pressure metalorganic chemical vapor deposition. The volatile metalorganic precursors employed were Sr(hexafluoroacetyl acetonate){sub 2}{center_dot}tetraglyme and titanium tetraisopropoxide. Single-phase, epitaxial films were deposited on (100)LaAlO{sub 3} at a temperature of 810 {degree}C. In-plane epitaxy was verified using x-ray phi scan analysis. The SrTiO{sub 3} films exhibit a significant tetragonal distortion with c/a=1.010({plus_minus}1.6{times}10{sup {minus}4}) at room temperature. No evidence of fluorine contamination is noted by x-ray diffraction or by Auger electron spectroscopy measurements. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.
- DOE Contract Number:
- FG02-85ER45209
- OSTI ID:
- 64850
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 24 Vol. 66; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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