Spectroscopic ellipsometry for the characterization of thin films

Journal Article · Sun Jul 01 04:00:00 EDT 1990 · Journal of the Electrochemical Society; (USA)

DOI:https://doi.org/10.1149/1.2086913· OSTI ID:6481501

Ferrieu, F; Lecat, J H ^[1]

---

1. Centre National d'Etudes des Telecommunications, CNET, Chemin du vieux Chene, BP98-38243 Meylan Cedex (FR)

In the visible range from 250 to 900 nm, a variety of spectroscopic ellipsometers are presently available from different manufacturers. Some of these instruments can be used off-line for thin film characterization, but other instruments are fully compatible with vacuum systems and the {ital in situ} study of phenomena such as growth kinetics, thin film deposition processes, and surface adsorption effects. A review of the existing spectroscopic ellipsometers is given as well as an up-to-date ellipsometric configuration still under development, which involves three polarizers. The relative accuracy of this latter instrument is discussed. A review of the applications of this technique in the case of bulk or layered materials and of the problems encountered in the microelectronics industry is given. Spectroscopic ellipsometry can also be performed in the infrared range. Some first results, measured with a prototype of this instrument, are shown in order to demonstrate the degree of sensitivity of this technique.

• OSTI ID: 6481501
• Journal Information: Journal of the Electrochemical Society; (USA), Journal Name: Journal of the Electrochemical Society; (USA) Vol. 137:7; ISSN JESOA; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102 -- Chemical & Spectral Procedures
42 ENGINEERING
426000 -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL REACTION KINETICS
CRYSTAL GROWTH METHODS
ELECTROMAGNETIC RADIATION
ELLIPSOMETERS
ELLIPSOMETRY
FILMS
INFRARED RADIATION
KINETICS
MEASURING INSTRUMENTS
MEASURING METHODS
MICROELECTRONICS
POLARIMETERS
RADIATIONS
REACTION KINETICS
THIN FILMS
VISIBLE RADIATION