Laser writing: A new technique for fabrication of electronic and optoelectronic Y-Ba-Cu-O devices and circuits
- Univ. of Rochester, NY (United States)
- Westinghouse Science and Technology Center, Pittsburgh, PA (United States)
The authors report their studies on the fabrication of YBa{sub 2}Cu{sub 3}O{sub x} (YBCO) thin-film structures, patterned with a laser-writing technique. They demonstrate that this patterning method can be successfully implemented in fabricating a variety of electronic and optoelectronic high-{Tc} devices and circuits. Depending on the film`s initial oxygen content and the ambient atmosphere, laser heating allows oxygen to diffuse in or out of the annealed region and form oxygen-rich (YBa{sub 2}Cu{sub 3}O{sub 7}; superconducting) patterns next to oxygen-depleted (YBa{sub 2}Cu{sub 3}O{sub 6}; insulating at low temperature) ones. The width of the YBa{sub 2}Cu{sub 3}O{sub 7-}YBa{sub 2}Cu{sub 3}O{sub 6} interface is less than 1 {mu}m. The laser-writing procedure is noninvasive, does not require a patterning mask, and results in completely planar, monolithic structures, free of surface contamination or edge degradation. Their oxygen-rich lines (typically 4 to 60 {mu}m wide), patterned on the high-quality, intentionally deoxygenated YBCO films, exhibit zero resistivity at 90 K and critical current density of approximately 3 MA/cm{sup 2} at 77 K. Their superconducting properties remain unchanged even after eight months of shelf storage. On the other hand, oxygen-poor regions are semiconducting and characterized at low temperatures by a three-dimensional, variable-length hopping transport. Below 100 K, they exhibit low microwave losses, their dc resistance is above 10 M{Omega}/square, and dielectric permittivity is below 20 at about 10 GHz. A number of devices and circuits patterned by laser writing, such as a microbridge, coplanar transmission line, open-ended coplanar microwave resonator, photoconductive switch, and YBCO field-effect transistor, are presented. All structures are intrinsic to the YBCO material, and they combine in a new and unique way superconducting and dielectric properties of the YBa{sub 2}Cu{sub 3}O{sub 7} and YBa{sub 2}Cu{sub 3}O{sub 6} phases.
- OSTI ID:
- 64680
- Report Number(s):
- CONF-940142-; ISBN 0-8194-1455-7; TRN: IM9528%%340
- Resource Relation:
- Conference: OE/LASE `94: conference on optics, electro-optics, and laser applications in science and engineering, Los Angeles, CA (United States), 22-29 Jan 1994; Other Information: PBD: 1994; Related Information: Is Part Of Superconductive devices and circuits. Proceedings SPIE Volume 2160; Buhrman, R.A.; Clarke, J.; Daly, K.; Koch, R.H.; Luine, J.A.; Simon, R.W. [eds.]; PB: 272 p.
- Country of Publication:
- United States
- Language:
- English
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