Effect of step edge transition rates and anisotropy in simulations of epitaxial growth

Conference · Sun Dec 31 23:00:00 EST 1989

OSTI ID:6457950

Chason, E; Dodson, B W

We present the results of a hybrid rate equation/Monte Carlo simulation of epitaxial growth on vicinal surfaces. We have studied the effect on surface morphology of changing transition rates at step edges, of changing detachment rates from step edges and clusters, and of adding anisotropy to the diffusion and incorporation kinetics at step edges and islands. The effect of the transition rates on surface morphology are discussed in terms of a balance between growth by nucleation and coalescence of islands and by the propagation of steps. 11 refs., 6 figs., 1 tab.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• Sponsoring Organization: DOE/DP
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6457950
• Report Number(s): SAND-90-1239C; CONF-901035--10; ON: DE91001251
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360602 -- Other Materials-- Structure & Phase Studies
ANISOTROPY
COALESCENCE
COMPUTERIZED SIMULATION
CRYSTAL GROWTH
DIFFUSION
KINETICS
MATERIALS
MONTE CARLO METHOD
MORPHOLOGY
NUCLEATION
SEMICONDUCTOR MATERIALS
SIMULATION
SURFACES
TEMPERATURE DEPENDENCE