Effect of step edge transition rates and anisotropy in simulations of epitaxial growth

Journal Article · Wed May 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577659· OSTI ID:5559336

Chason, E; Dodson, B W ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (USA)

The results of a hybrid rate equation/Monte Carlo simulation of epitaxial growth on vicinal surfaces is presented. The effect on surface morphology of changing transition rates at step edges, of changing detachment rates from step edges and clusters, and of adding anisotropy to the diffusion and incorporation kinetics at step edges and islands was studied. The effect of the transition rates on surface morphology are discussed in terms of a balance between growth by nucleation and coalescence of islands and by the propagation of steps.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5559336
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
COMPUTERIZED SIMULATION
DIFFUSION
EPITAXY
FILMS
MONTE CARLO METHOD
NUCLEATION
ROUGHNESS
SIMULATION
SURFACE PROPERTIES
TEMPERATURE EFFECTS
THIN FILMS
VAPOR PHASE EPITAXY