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Surface compositional modifications during O/sup +//sub 2/ bombardment of binary alloys

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.92438· OSTI ID:6449374

Surface compositional modifications of binary alloys during 15-keV O/sup +//sub 2/ bombardment under 45/sup 0/ incidence were studied using Auger electron spectroscopy under ultrahigh vacuum conditions. For A1-Ni, Cr-Ni, Fe-Ni, and Pd-Ni alloys, the reactive preferential sputtering by O/sup +//sub 2/ causes a surface enrichment of the alloy component which has the smaller metal-oxygen bond energy per metal atom. For Cu-Ni and Ag-Pd alloys, where oxidation by the O/sup +//sub 2/ beam was slight, the surface compositions after O/sup +//sub 2/ bombardment were qualitatively similar to those caused by nonreactive preferential sputtering with Ar/sup +/.

Research Organization:
IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
OSTI ID:
6449374
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 38:7; ISSN APPLA
Country of Publication:
United States
Language:
English