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N,N prime -bis(triethylaluminio)ethylenediamine- and N,N prime -Bis(trimethylaluminio)ethylenediamine-derived organometallic precursors to aluminum nitride: Syntheses, structures, and pyrolyses

Journal Article · · Chemistry of Materials; (USA)
OSTI ID:6447146
;  [1]
  1. Rensselaer Polytechnic Institute, Troy, NY (USA)

The reactions of triethylaluminum or trimethylaluminum with ethylenediamine (en) in a 2:1 molar ratio have been studied. Pyrolysis of the initially formed adducts under nitrogen yields polymeric amides and imides. Evidence was also obtained for the formation of novel en-chelated organoaluminum intermediates during the conversion of the adducts to the amides. The structures and properties of the adducts, as well as their pyrolysis products, have been studied with {sup 1}H and {sup 13}C NMR, FT-IR, GC, DSC, TGA, elemental analysis, and XRD methods. AlN powder has been obtained by the pyrolysis of the imides at 1,000{degree}C in NH{sub 3}. Preliminary studies were also carried out on the fabrication of AlN thin films on Si substrates by solution coating, using a solution of the bis(diethylaluminio)ethylenediamine in benzene, followed by pyrolysis under NH{sub 3}.

OSTI ID:
6447146
Journal Information:
Chemistry of Materials; (USA), Journal Name: Chemistry of Materials; (USA) Vol. 2:4; ISSN CMATE; ISSN 0897-4756
Country of Publication:
United States
Language:
English