Resistive model of the rf discharge including additional dc currents and electrodes

Journal Article · Fri Jan 01 04:00:00 EST 1993 · Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics; (United States)

DOI:https://doi.org/10.1103/PhysRevE.47.591· OSTI ID:6438981

Klick, M ^[1]

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1. Adolf-Slaby-Institut, Slabystrasse 7a, D-O-1160 Berlin (Germany)

A resistive model including additional dc currents and electrodes enables understanding and analysis of rf discharges in the low-frequency range ([omega][much lt][omega][sub [ital p][ital i]]). A general and exact analysis based on asymptotic solutions results in analytic representations of relations between sheath voltages, bias, and rf voltage. For sinusoidal rf voltage an expansion of sheath voltages and discharge current into Fourier series, e.g., important for probe measurements, and a general relation between these series is presented. From the power balance a lower bound of a sinusoidal rf voltage is derived. The model is extended for different densities and electron temperatures along the sheath edges. Correction and error estimation show the asymptotic solution to be well suited.

• OSTI ID: 6438981
• Journal Information: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics; (United States), Journal Name: Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics; (United States) Vol. 47:1; ISSN 1063-651X; ISSN PLEEE8
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700320* -- Plasma Diagnostic Techniques & Instrumentation-- (1992-)
ASYMPTOTIC SOLUTIONS
CURRENTS
DIRECT CURRENT
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRODES
ELECTRON TEMPERATURE
FOURIER ANALYSIS
MATHEMATICAL MODELS
PLASMA DENSITY
RF SYSTEMS