Future prospects for ECR plasma generators with improved charge state distributions
Conference
·
OSTI ID:642724
The growing number and variety of fundamental, applied, and industrial uses for high intensity, high charge state ion beams continues to be the driving force behind efforts to develop Electron Cyclotron Resonance (ECR) ion sources with superior performance characteristics. Incumbent with the advent of sub-micron electronic devices and their fabrication has been the demand for improved process control and optimization. These demands have led to the development of methods for cleaning, chemical etching, and deposition of thin films based on the use of plasma devices including ECR sources. Despite the steady advance in the technology, ECR plasma heating has not yet reached its full potential in terms of charge state and intensity within a particular charge state, in part, because of the narrow band width, single-frequency microwave radiation commonly used to heat the plasma electrons. This heating technique, coupled with conventional minimum-B configuration magnetic fields used for confining the electrons, resulting in the formation of the thin, ECR surfaces within the plasma volumes of these sources. This report identifies fundamentally important methods for enhancing the performances of ECR plasma generators by transforming the ECR zones from surfaces to volumes. Two methods are readily available for increasing the sizes of these zones. These techniques include: (1) a tailored magnetic field configuration in combination with single-frequency microwave radiation to create a large uniformly distributed ECR volume and; (2) the use of broadband-frequency domain techniques derived from standard TWT technology, to transform the resonant plasma surfaces of traditional ECR ion sources into resonant plasma volumes.
- Research Organization:
- Oak Ridge National Lab., TN (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC05-96OR22464; FG05-87ER40361
- OSTI ID:
- 642724
- Report Number(s):
- CONF-9706174--1; ON: DE97008561; BR: KB0402000
- Country of Publication:
- United States
- Language:
- English
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