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Design of a normal incidence multilayer imaging X-ray microscope

Journal Article · · Journal of X-ray Science and Technology; (USA)
; ; ;  [1]
  1. Alabama Univ., Birmingham (USA) NASA, Marshall Space Flight Center, Huntsville, AL (USA) Stanford Univ., CA (USA)
Normal incidence multilayer Cassegrain X-ray telescopes were flown on the Stanford/MSFC Rocket X-ray Spectroheliograph. These instruments produced high spatial resolution images of the sun and conclusively demonstrated that doubly reflecting multilayer X-ray optical systems are feasible. The images indicated that aplanatic imaging soft X-ray/EUV microscopes should be achievable using multilayer optics technology. A doubly reflecting normal incidence multilayer imaging X-ray microscope based on the Schwarzschild configuration has been designed. The design of the microscope and the results of the optical system ray trace analysis are discussed. High resolution aplanatic imaging X-ray microscopes using normal incidence multilayer X-ray mirrors should have many important applications in advanced X-ray astronomical instrumentation, X-ray lithography, biological, biomedical, metallurgical, and laser fusion research. 37 refs.
OSTI ID:
6426286
Journal Information:
Journal of X-ray Science and Technology; (USA), Journal Name: Journal of X-ray Science and Technology; (USA) Vol. 1; ISSN 0895-3996; ISSN JXSTE
Country of Publication:
United States
Language:
English