An analytical electron microscopy investigation of amorphous structures in ion-implanted Al/sub 2/O/sub 3/
Recently characterization of the microstructure of as-implanted ceramics in order to understand the basic physical effects involved in this processing technique has been the subject of extensive investigation. Of equal importance is the behavior of the modified material during post-implantation treatments. Analytical electron microscopy (AEM) is ideally suited to this type of investigation. This paper describes the results of an AEM study of the difference between two types of amorphous Al/sub 2/O/sub 3/; the first made amorphous by implanting crystalline ..cap alpha..-Al/sub 2/O/sub 3/ with a stoichiometric ratio of aluminum and oxygen at -185/sup 0/C, and the second by implanting with iron at -185/sup 0/C. The different response of these two materials to post-implantation annealing suggests a fundamental chemical or structural difference in the as-implanted state. Analysis of the extended energy loss fine structure as well as the diffuse halos in selected area electron diffraction patterns indicate that structural differences do exist.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6417560
- Report Number(s):
- CONF-870733-8; ON: DE87012537
- Country of Publication:
- United States
- Language:
- English
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