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Title: Multilayer dielectric diffraction gratings

Abstract

The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described. 7 figs.

Inventors:
; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE; USDOE, Washington, DC (United States)
OSTI Identifier:
6414577
Patent Number(s):
US 5907436; A
Application Number:
PPN: US 8-536874
Assignee:
Univ. of California, Oakland, CA (United States) PTO; EDB-99-081354
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 29 Sep 1995
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; DESIGN; DIELECTRIC MATERIALS; DIFFRACTION GRATINGS; FABRICATION; LAYERS; OPTICAL SYSTEMS; MATERIALS; 440600* - Optical Instrumentation- (1990-)

Citation Formats

Perry, M.D., Britten, J.A., Nguyen, H.T., Boyd, R., and Shore, B.W. Multilayer dielectric diffraction gratings. United States: N. p., 1999. Web.
Perry, M.D., Britten, J.A., Nguyen, H.T., Boyd, R., & Shore, B.W. Multilayer dielectric diffraction gratings. United States.
Perry, M.D., Britten, J.A., Nguyen, H.T., Boyd, R., and Shore, B.W. Tue . "Multilayer dielectric diffraction gratings". United States.
@article{osti_6414577,
title = {Multilayer dielectric diffraction gratings},
author = {Perry, M.D. and Britten, J.A. and Nguyen, H.T. and Boyd, R. and Shore, B.W.},
abstractNote = {The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 25 00:00:00 EDT 1999},
month = {Tue May 25 00:00:00 EDT 1999}
}