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Title: Multilayer dielectric diffraction gratings

Abstract

The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described.

Inventors:
 [1];  [2];  [1];  [1];  [1]
  1. (Livermore, CA)
  2. (Oakley, CA)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872305
Patent Number(s):
US 5907436
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multilayer; dielectric; diffraction; gratings; design; fabrication; grating; structures; efficiency; reflection; transmission; described; forming; structure; alternating; index; materials; placing; top; adjustable; variable; optical; bandwidth; obtained; varying; 98; percent; achieved; controlling; depth; shape; material; comprising; grooves; methods; fabricating; etching; techniques; multilayer dielectric; dielectric materials; material comprising; diffraction grating; dielectric material; multilayer structure; grating structure; etching techniques; diffraction gratings; diffraction efficiency; grating structures; optical band; /359/430/

Citation Formats

Perry, Michael D., Britten, Jerald A., Nguyen, Hoang T., Boyd, Robert, and Shore, Bruce W. Multilayer dielectric diffraction gratings. United States: N. p., 1999. Web.
Perry, Michael D., Britten, Jerald A., Nguyen, Hoang T., Boyd, Robert, & Shore, Bruce W. Multilayer dielectric diffraction gratings. United States.
Perry, Michael D., Britten, Jerald A., Nguyen, Hoang T., Boyd, Robert, and Shore, Bruce W. Fri . "Multilayer dielectric diffraction gratings". United States. https://www.osti.gov/servlets/purl/872305.
@article{osti_872305,
title = {Multilayer dielectric diffraction gratings},
author = {Perry, Michael D. and Britten, Jerald A. and Nguyen, Hoang T. and Boyd, Robert and Shore, Bruce W.},
abstractNote = {The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}

Patent:

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