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Design optimization of a capacitive transducer for displacement measurement

Conference · · IEEE Transactions on Magnetics
OSTI ID:6414362
; ;  [1]
  1. Marquette Univ., Milwaukee, WI (United States). Electrical and Computer Engineering Dept.
Capacitive transducers are used to measure displacements automatically and precisely. In general, performance of these devices are based on their capacitances. In this paper, Inverse Problem Methodology (IPM) is applied with boundary elements for design optimization of comb-shaped capacitive transducers. Efficiency of IPM is successfully verified by comparing the optimum design using IPM to that obtained using a classical method.
OSTI ID:
6414362
Report Number(s):
CONF-9806101--
Conference Information:
Journal Name: IEEE Transactions on Magnetics Journal Volume: 35:3Pt1
Country of Publication:
United States
Language:
English